Tetramethyl ammonium hydroxide (TMAH): Toxicity, Hazards and Controls
The Semiconductor Environmental, Safety and Health Association (SESHA) conducted a webinar about this chemical, commonly used as a “developer” in the semiconductor device manufacturing industry.
- There are a growing number of semiconductor processing applications which propose to use TMAH at high concentrations and sometimes at elevated temperatures.
- Tool vendors, chemical formulators, and other semiconductor companies may not be aware of TMAH’s high acute systemic toxicity.
